Inventor · disambiguated record
Tsunehiko Tsubone
Also filed as: TSUBONE TSUNEHIKO
95 granted patents·18 pending applications·2,696 citations·filing 1984–2019
99Inventor score
Top patents by PatentIndex Score
113 records- 0198USD557226SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 11, 2007·619 cites·1 claims
- 0297US6388382B1Plasma processing apparatus and methodHITACHI LTD·Filed 2000·Granted May 14, 2002·78 cites·40 claims
- 0397US4565601AMethod and apparatus for controlling sample temperatureHITACHI LTD·Filed 1984·Granted Jan 21, 1986·451 cites·20 claims
- 0494US6833051B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Dec 21, 2004·33 cites·13 claims
- 0593US5784799AVacuum processing apparatus for substate wafersHITACHI LTD·Filed 1997·Granted Jul 28, 1998·59 cites·8 claims
- 0693US5314509AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1991·Granted May 24, 1994·78 cites·23 claims
- 0792US6756737B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Jun 29, 2004·37 cites·4 claims
- 0892US6180019B1Plasma processing apparatus and methodHITACHI LTD·Filed 1997·Granted Jan 30, 2001·51 cites·2 claims
- 0991US6499424B2Plasma processing apparatus and methodHITACHI LTD·Filed 2001·Granted Dec 31, 2002·23 cites·12 claims
- 1091US5320982AWafer cooling method and apparatusHITACHI LTD·Filed 1991·Granted Jun 14, 1994·142 cites·13 claims
- 1190US6048434ASubstrate holding system including an electrostatic chuckHITACHI LTD·Filed 1996·Granted Apr 11, 2000·68 cites·15 claims
- 1290US5685684AVacuum processing systemHITACHI LTD·Filed 1996·Granted Nov 11, 1997·112 cites·4 claims
- 1388US5906684AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted May 25, 1999·54 cites·21 claims
- 1488US4824309AVacuum processing unit and apparatusHITACHI LTD·Filed 1986·Granted Apr 25, 1989·96 cites·9 claims
- 1587US6524428B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Feb 25, 2003·24 cites·11 claims
- 1687US5792304AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1994·Granted Aug 11, 1998·62 cites·14 claims
- 1786US6301802B1Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 16, 2001·13 cites·11 claims
- 1886US6217705B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2000·Granted Apr 17, 2001·26 cites·10 claims
- 1984US6645871B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Nov 11, 2003·20 cites·5 claims
- 2082US7367135B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2005·Granted May 6, 2008·2 cites·2 claims
- 2182US6846363B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Jan 25, 2005·11 cites·6 claims
- 2282US5553396AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1995·Granted Sep 10, 1996·24 cites·10 claims
- 2382US5349762AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1993·Granted Sep 27, 1994·28 cites·28 claims
- 2481US6481370B2Plasma processsing apparatusHITACHI LTD·Filed 2000·Granted Nov 19, 2002·10 cites·9 claims
- 2581US5078851ALow-temperature plasma processorNISHIHATA KOUJI·Filed 1990·Granted Jan 7, 1992·81 cites·8 claims
- 2680US6968630B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Nov 29, 2005·7 cites·2 claims
- 2779US7567422B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 28, 2009·6 cites·7 claims
- 2879US5445484AVacuum processing systemHITACHI LTD·Filed 1993·Granted Aug 29, 1995·67 cites·5 claims
- 2977US8093529B2Control method of a temperature of a sampleKOFUJI NAOYUKI·Filed 2008·Granted Jan 10, 2012·6 cites·20 claims
- 3077US6899789B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2003·Granted May 31, 2005·11 cites·5 claims
- 3177US6634116B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Oct 21, 2003·6 cites·5 claims
- 3277US6446353B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Sep 10, 2002·6 cites·37 claims
- 3376US5950330AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1998·Granted Sep 14, 1999·16 cites·28 claims
- 3475US6314658B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2000·Granted Nov 13, 2001·5 cites·25 claims
- 3575US4911812APlasma treating method and apparatus thereforHITACHI LTD·Filed 1988·Granted Mar 27, 1990·47 cites·16 claims
- 3674US6676805B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Jan 13, 2004·10 cites·12 claims
- 3773US6886272B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted May 3, 2005·4 cites·9 claims
- 3873US6880264B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted Apr 19, 2005·4 cites·108 claims
- 3972US6544379B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Apr 8, 2003·9 cites·50 claims
- 4070US6610170B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Aug 26, 2003·8 cites·2 claims
- 4170US5961774AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1997·Granted Oct 5, 1999·22 cites·6 claims
- 4270US5673750AVacuum processing method and apparatusHITACHI LTD·Filed 1995·Granted Oct 7, 1997·37 cites·9 claims
- 4370US5661913AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1996·Granted Sep 2, 1997·11 cites·9 claims
- 4469US6484414B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 26, 2002·3 cites·20 claims
- 4569US6473989B2Conveying system for a vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 5, 2002·3 cites·9 claims
- 4668US6336991B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted Jan 8, 2002·19 cites·10 claims
- 4767US5085750APlasma treating method and apparatus thereforHITACHI LTD·Filed 1989·Granted Feb 4, 1992·34 cites·9 claims
- 4866US6610171B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Aug 26, 2003·6 cites·2 claims
- 4966US6221201B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted Apr 24, 2001·18 cites·2 claims
- 5065US6904699B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Jun 14, 2005·2 cites·4 claims
Showing the top 50 of 113 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →