Inventor · disambiguated record
Elena Lawrence
Also filed as: LAWRENCE ELENA
6 granted patents·14 citations·filing 2013–2019
75Inventor score
Top patents by PatentIndex Score
6 records- 0177US9698062B2System and method for performing a wet etching processVEECO PREC SURFACE PROC LLC·Filed 2013·Granted Jul 4, 2017·6 cites·17 claims
- 0276US9541837B2Apparatus and method for removing challenging polymer films and structures from semiconductor wafersVEECO PREC SURFACE PROC LLC·Filed 2013·Granted Jan 10, 2017·5 cites·20 claims
- 0371US11004755B2Apparatus and method for the minimization of undercut during a UBM etch processVEECO INSTR INC·Filed 2019·Granted May 11, 2021·2 cites·25 claims
- 0467US10553502B2Two etch method for achieving a wafer thickness profileVEECO PRECISION SURFACE PROC LLC·Filed 2018·Granted Feb 4, 2020·1 cites·17 claims
- 0544US10026660B2Method of etching the back of a wafer to expose TSVsVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted Jul 17, 2018·0 cites·32 claims
- 0639US11069583B2Apparatus and method for the minimization of undercut during a UBM etch processVEECO INSTR INC·Filed 2019·Granted Jul 20, 2021·0 cites·21 claims
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