Inventor · disambiguated record
Roger T. Howe
Also filed as: HOWE ROGER T · HOWE ROGER THOMAS
68 granted patents·1 pending application·6,425 citations·filing 1985–2021
99Inventor score
Files withUNIV CALIFORNIA24UNIV LELAND STANFORD JUNIOR9ANALOG DEVICES INC8MASSACHUSETTS INST TECHNOLOGY8QUEVY EMMANUEL P5
Top patents by PatentIndex Score
69 records- 0199US7923790B1Planar microshells for vacuum encapsulated devices and damascene method of manufactureSILICON LAB INC·Filed 2007·Granted Apr 12, 2011·127 cites·54 claims
- 0299US7211926B2Temperature compensated oscillator including MEMS resonator for frequency controlUNIV CALIFORNIA·Filed 2006·Granted May 1, 2007·133 cites·22 claims
- 0399US5491604AQ-controlled microresonators and tunable electronic filters using such resonatorsUNIV CALIFORNIA·Filed 1992·Granted Feb 13, 1996·233 cites·19 claims
- 0498US7659150B1Microshells for multi-level vacuum cavitiesSILICON CLOCKS INC·Filed 2007·Granted Feb 9, 2010·96 cites·18 claims
- 0598US6236281B1Q-controlled microresonators and tunable electronic filters using such resonatorsUNIV CALIFORNIA·Filed 1999·Granted May 22, 2001·174 cites·7 claims
- 0698US6067858AMicromachined vibratory rate gyroscopeUNIV CALIFORNIA·Filed 1997·Granted May 30, 2000·398 cites·4 claims
- 0798US5919364AMicrofabricated filter and shell constructed with a permeable membraneUNIV CALIFORNIA·Filed 1996·Granted Jul 6, 1999·170 cites·15 claims
- 0898US5025346ALaterally driven resonant microstructuresUNIV CALIFORNIA·Filed 1989·Granted Jun 18, 1991·702 cites·20 claims
- 0997US8313970B2Planar microshells for vacuum encapsulated devices and damascene method of manufactureQUEVY EMMANUEL P·Filed 2011·Granted Nov 20, 2012·23 cites·36 claims
- 1097US8288835B2Microshells with integrated getter layerQUEVY EMMANUEL P·Filed 2011·Granted Oct 16, 2012·31 cites·26 claims
- 1197US7595209B1Low stress thin film microshellsSILICON CLOCKS INC·Filed 2007·Granted Sep 29, 2009·58 cites·12 claims
- 1297US7256107B2Damascene process for use in fabricating semiconductor structures having micro/nano gapsUNIV CALIFORNIA·Filed 2005·Granted Aug 14, 2007·41 cites·19 claims
- 1397US6481285B1Micro-machined angle-measuring gyroscopeFiled 2000·Granted Nov 19, 2002·211 cites·23 claims
- 1497US6210988B1Polycrystalline silicon germanium films for forming micro-electromechanical systemsUNIV CALIFORNIA·Filed 2000·Granted Apr 3, 2001·347 cites·43 claims
- 1597US5955932AQ-controlled microresonators and tunable electric filters using such resonatorsUNIV CALIFORNIA·Filed 1995·Granted Sep 21, 1999·112 cites·1 claims
- 1697US5839062AMixing, modulation and demodulation via electromechanical resonatorsUNIV CALIFORNIA·Filed 1994·Granted Nov 17, 1998·141 cites·15 claims
- 1797US5589082AMicroelectromechanical signal processor fabricationUNIV CALIFORNIA·Filed 1995·Granted Dec 31, 1996·182 cites·8 claims
- 1897US5455547AMicroelectromechanical signal processorsUNIV CALIFORNIA·Filed 1994·Granted Oct 3, 1995·130 cites·2 claims
- 1997US5314572AMethod for fabricating microstructuresANALOG DEVICES INC·Filed 1992·Granted May 24, 1994·144 cites·7 claims
- 2097US5043043AMethod for fabricating side drive electrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1990·Granted Aug 27, 1991·141 cites·7 claims
- 2197US4943750AElectrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Jul 24, 1990·146 cites·27 claims
- 2297US4860232ADigital technique for precise measurement of variable capacitanceMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Aug 22, 1989·112 cites·38 claims
- 2397US4851080AResonant accelerometerMASSACHUSETTS INST TECHNOLOGY·Filed 1988·Granted Jul 25, 1989·151 cites·8 claims
- 2496US6142358AWafer-to-wafer transfer of microstructures using break-away tethersUNIV CALIFORNIA·Filed 1997·Granted Nov 7, 2000·274 cites·5 claims
- 2596US4805456AResonant accelerometerMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Feb 21, 1989·128 cites·35 claims
- 2696US4674319AIntegrated circuit sensorUNIV CALIFORNIA·Filed 1985·Granted Jun 23, 1987·131 cites·16 claims
- 2795US8273594B2Planar microshells for vacuum encapsulated devices and damascene method of manufactureQUEVY EMMANUEL P·Filed 2011·Granted Sep 25, 2012·11 cites·29 claims
- 2895US7736929B1Thin film microshells incorporating a getter layerSILICON CLOCKS INC·Filed 2007·Granted Jun 15, 2010·42 cites·14 claims
- 2995US7591201B1MEMS structure having a compensated resonating memberSILICON CLOCKS INC·Filed 2007·Granted Sep 22, 2009·36 cites·18 claims
- 3095US6478974B1Microfabricated filter and shell constructed with a permeable membraneUNIV CALIFORNIA·Filed 1999·Granted Nov 12, 2002·106 cites·12 claims
- 3195US6448622B1Polycrystalline silicon-germanium films for micro-electromechanical systems applicationUNIV CALIFORNIA·Filed 2000·Granted Sep 10, 2002·167 cites·13 claims
- 3295US6296779B1Method of fabricating a sensorUNIV CALIFORNIA·Filed 1999·Granted Oct 2, 2001·173 cites·16 claims
- 3395US5537083AMicroelectromechanical signal processorsUNIV CALIFORNIA·Filed 1994·Granted Jul 16, 1996·124 cites·23 claims
- 3494US6250156B1Dual-mass micromachined vibratory rate gyroscopeUNIV CALIFORNIA·Filed 1999·Granted Jun 26, 2001·316 cites·23 claims
- 3594US5969249AResonant accelerometer with flexural lever leverage systemUNIV CALIFORNIA·Filed 1998·Granted Oct 19, 1999·109 cites·11 claims
- 3694US4997521AElectrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Mar 5, 1991·97 cites·5 claims
- 3793US7514853B1MEMS structure having a stress inverter temperature-compensated resonating memberSILICON CLOCKS INC·Filed 2007·Granted Apr 7, 2009·29 cites·45 claims
- 3893US5565625ASensor with separate actuator and sense fingersANALOG DEVICES INC·Filed 1994·Granted Oct 15, 1996·77 cites·32 claims
- 3993US4896098ATurbulent shear force microsensorMASSACHUSETTS INST TECHNOLOGY·Filed 1988·Granted Jan 23, 1990·99 cites·54 claims
- 4092US8864969B2Electro-diffusion enhanced bio-molecule charge detection using electrostatic interactionLIU YANG·Filed 2010·Granted Oct 21, 2014·9 cites·24 claims
- 4191US7858422B1MEMS coupler and method to form the sameSILICON LABS SC INC·Filed 2007·Granted Dec 28, 2010·16 cites·37 claims
- 4290US5542295AApparatus to minimize stiction in micromachined structuresANALOG DEVICES INC·Filed 1994·Granted Aug 6, 1996·81 cites·20 claims
- 4389US7956517B1MEMS structure having a stress inverter temperature-compensated resonator memberSILICON LAB·Filed 2008·Granted Jun 7, 2011·17 cites·24 claims
- 4489US5858809AConductive plane beneath suspended microstructureANALOG DEVICES INC·Filed 1997·Granted Jan 12, 1999·69 cites·10 claims
- 4589US5403665AMethod of applying a monolayer lubricant to micromachinesUNIV CALIFORNIA·Filed 1993·Granted Apr 4, 1995·81 cites·19 claims
- 4688US5640039AConductive plane beneath suspended microstructureANALOG DEVICES INC·Filed 1994·Granted Jun 17, 1997·51 cites·13 claims
- 4787US4823607AReleased film structures and method of measuring film propertiesMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Apr 25, 1989·56 cites·17 claims
- 4886US9188560B2Electro-diffusion enhanced bio-molecule charge detection using electrostatic interactionUNIV LELAND STANFORD JUNIOR·Filed 2014·Granted Nov 17, 2015·4 cites·24 claims
- 4984US9607815B2Low work-function, mechanically and thermally robust emitter for thermionic energy convertersUNIV LELAND STANFORD JUNIOR·Filed 2014·Granted Mar 28, 2017·5 cites·9 claims
- 5083US8633573B2Strained semiconductor materials, devices and methods thereforeJAIN JINENDRA RAJA·Filed 2010·Granted Jan 21, 2014·8 cites·20 claims
Showing the top 50 of 69 patent records by PatentIndex Score.
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