Inventor · disambiguated record

Anatoly Schemelinin

Also filed as: SCHEMELININ ANATOLY

1 granted patent·157 citations·filing 2007–2007

55Inventor score

Technology areasG01N

Files withKLA TENCOR TECH CORP1

Top patents by PatentIndex Score

1 record

0195US7705331B1Methods and systems for providing illumination of a specimen for a process performed on the specimenKLA TENCOR TECH CORP·Filed 2007·Granted Apr 27, 2010·157 cites·116 claims

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