Inventor · disambiguated record

Dal-Keun Park

Also filed as: PARK DAL-KEUN

1 granted patent·6 citations·filing 2002–2002

28Inventor score

Technology areasH01J

Files withKOREA INST SCI & TECH1

Top patents by PatentIndex Score

1 record

0159US6851939B2System for chemical vapor deposition at ambient temperature using electron cyclotron resonance and method for depositing metal composite film using the sameKOREA INST SCI & TECH·Filed 2002·Granted Feb 8, 2005·6 cites·8 claims

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