Inventor · disambiguated record
Jui-Chung Peng
Also filed as: PENG JUI-CHUNG
9 granted patents·1 pending application·25 citations·filing 2004–2016
83Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3PENG JUI-CHUNG2TAIWAN SEMICONDUCTOR MFG CO LTD2CHEN NAN-JUNG1CHIU YU-YEN1
Top patents by PatentIndex Score
10 records- 0192US8199314B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2011·Granted Jun 12, 2012·12 cites·20 claims
- 0279US8068208B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2007·Granted Nov 29, 2011·5 cites·17 claims
- 0376US7795601B2Method and apparatus to improve lithography throughputTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Sep 14, 2010·4 cites·20 claims
- 0474US7738692B2Methods of determining quality of a light sourceTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Jun 15, 2010·3 cites·16 claims
- 0561US7571021B2Method and system for improving critical dimension uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Aug 4, 2009·1 cites·17 claims
- 0658USRE47197EMethods of determining quality of a light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 8, 2019·0 cites·20 claims
- 0756USRE47272EMethods of determining quality of a light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 5, 2019·0 cites·31 claims
- 0844US8184896B2Methods of determining quality of a light sourceCHEN NAN-JUNG·Filed 2010·Granted May 22, 2012·0 cites·20 claims
- 0940US2006054432A1Anti-shock systemCHIU YU-YEN·Filed 2004·Application pending·0 cites
- 1034US9529275B2Lithography scanner throughputLIN CHIEN-HSUN·Filed 2007·Granted Dec 27, 2016·0 cites·22 claims
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