Inventor · disambiguated record

Luuk Johannes Helena Seelen

Also filed as: SEELEN LUUK JOHANNES HELENA

1 granted patent·0 citations·filing 2020–2020

3Inventor score

Technology areasG01B

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0144US11940264B2Mirror calibrating method, a position measuring method, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 26, 2024·0 cites·20 claims

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