Inventor · disambiguated record
Muchen Xu
Also filed as: XU MUCHEN
3 granted patents·2 pending applications·0 citations·filing 2015–2023
42Inventor score
Top patents by PatentIndex Score
5 records- 0172US12365585B2Method of forming a microstructured surfaceUNIV CALIFORNIA·Filed 2023·Granted Jul 22, 2025·0 cites·13 claims
- 0251US2025060682A1Lithographic apparatus, illumination system, and connection sealing device with protective shieldASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0345US9983111B2Low profile shear-sensing unitUNIV CALIFORNIA·Filed 2016·Granted May 29, 2018·0 cites·21 claims
- 0445US2018320717A1Device and method for gas maintenance in microfeatures on a submerged surfaceUNIV CALIFORNIA·Filed 2015·Application pending·0 cites
- 0536US10927005B2Method for manufacturing doubly re-entrant microstructuresUNIV CALIFORNIA·Filed 2016·Granted Feb 23, 2021·0 cites·20 claims
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