Inventor · disambiguated record
Hans Meiling
Also filed as: MEILING HANS
14 granted patents·4 pending applications·371 citations·filing 1994–2005
93Inventor score
Files withASML NETHERLANDS BV12TEL AMERICA INC2ASM LITHOGRAPHY BV1DEBYE INST UNIVERSITEIT ULTREC1DEBYE INST UNIVERSITEIT UTRECH1
Top patents by PatentIndex Score
18 records- 0194US5565036AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1994·Granted Oct 15, 1996·115 cites·34 claims
- 0291US6781673B2Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Aug 24, 2004·56 cites·30 claims
- 0391US6724460B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objectsASML NETHERLANDS BV·Filed 2001·Granted Apr 20, 2004·64 cites·13 claims
- 0489US6828569B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 7, 2004·33 cites·4 claims
- 0586US7522263B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·14 cites·20 claims
- 0686US5789867AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1996·Granted Aug 4, 1998·54 cites·12 claims
- 0773US6879374B2Device manufacturing method, device manufactured thereby and a mask for use in the methodASML NETHERLANDS BV·Filed 2002·Granted Apr 12, 2005·13 cites·42 claims
- 0868US7095479B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Aug 22, 2006·9 cites·12 claims
- 0961US7115886B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·5 cites·5 claims
- 1054US7492443B2Device manufacturing method, device manufactured thereby and a mask for use in the methodASML NETHERLANDS BV·Filed 2004·Granted Feb 17, 2009·3 cites·15 claims
- 1151US7151589B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·3 cites·32 claims
- 1250US2004227102A1Method and device for measuring contamination of a surface of a component of a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1341US6750474B1Semiconducting devices and method of making thereofDEBYE INST UNIVERSITEIT ULTREC·Filed 2001·Granted Jun 15, 2004·1 cites·9 claims
- 1440US2007146658A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 1538US7248340B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·0 cites·11 claims
- 1638US2002096647A1Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Application pending·0 cites
- 1738US2001052596A1Semiconducting devices and method of making thereofFiled 2001·Application pending·0 cites
- 1824US6686230B2Semiconducting devices and method of making thereofDEBYE INST UNIVERSITEIT UTRECH·Filed 1997·Granted Feb 3, 2004·1 cites·21 claims
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