Inventor · disambiguated record
Bastiaan Mertens
Also filed as: MERTENS BASTIAAN M · MERTENS BASTIAAN MATTHIAS
12 granted patents·2 pending applications·255 citations·filing 2001–2013
91Inventor score
Top patents by PatentIndex Score
14 records- 0195US6614505B2Lithographic projection apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Sep 2, 2003·99 cites·20 claims
- 0291US6724460B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objectsASML NETHERLANDS BV·Filed 2001·Granted Apr 20, 2004·64 cites·13 claims
- 0389US6828569B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 7, 2004·33 cites·4 claims
- 0488US7116394B2Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning systemZEISS CARL SMT AG·Filed 2003·Granted Oct 3, 2006·31 cites·31 claims
- 0580US9939737B2Electrostatic clampASML NETHERLANDS BV·Filed 2013·Granted Apr 10, 2018·6 cites·25 claims
- 0668US7684012B2Lithographic device, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Mar 23, 2010·2 cites·21 claims
- 0767US7279690B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 9, 2007·2 cites·37 claims
- 0866US7491951B2Lithographic apparatus, system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 17, 2009·2 cites·47 claims
- 0965US6862075B2Lithographic projection apparatus, device manufacturing method, and device manufacturing therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 1, 2005·8 cites·33 claims
- 1061US7115886B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·5 cites·5 claims
- 1151US7151589B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·3 cites·32 claims
- 1250US2004227102A1Method and device for measuring contamination of a surface of a component of a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1341US2007085984A1Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 1438US7248340B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·0 cites·11 claims
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