Inventor · disambiguated record
Willem Van Schaik
Also filed as: VAN SCHAIK WILLEM
8 granted patents·161 citations·filing 2001–2018
88Inventor score
Top patents by PatentIndex Score
8 records- 0191US6724460B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objectsASML NETHERLANDS BV·Filed 2001·Granted Apr 20, 2004·64 cites·13 claims
- 0289US6828569B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 7, 2004·33 cites·4 claims
- 0384US6538716B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Mar 25, 2003·24 cites·23 claims
- 0474US6924492B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Aug 2, 2005·14 cites·22 claims
- 0573US6825914B2System for flushing at least one internal space of an objectiveZEISS CARL SMT AG·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 0672US10295916B2EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted May 21, 2019·2 cites·20 claims
- 0761US7115886B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·5 cites·5 claims
- 0857US7508487B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 24, 2009·5 cites·55 claims
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