Inventor · disambiguated record

Yuuki Motomura

Also filed as: MOTOMURA YUUKI

2 granted patents·1 citations·filing 2019–2020

31Inventor score

Technology areasC23C H10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0167US11282733B2Stage mechanism, processing apparatus, and method of operating the stage mechanismTOKYO ELECTRON LTD·Filed 2019·Granted Mar 22, 2022·1 cites·11 claims
0252US11404255B2Sputtering method and sputtering apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 2, 2022·0 cites·20 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →