Inventor · disambiguated record

Yasuhiro Otagiri

Also filed as: OTAGIRI YASUHIRO

1 granted patent·0 citations·filing 2020–2020

8Inventor score

Technology areasC23C

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0152US11404255B2Sputtering method and sputtering apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 2, 2022·0 cites·20 claims

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