Inventor · disambiguated record
S. Sreenivasan
Also filed as: SREENIVASAN S V
5 granted patents·3 pending applications·767 citations·filing 2001–2017
85Inventor score
Top patents by PatentIndex Score
8 records- 0198US6696220B2Template for room temperature, low pressure micro-and nano-imprint lithographyUNIV TEXAS·Filed 2001·Granted Feb 24, 2004·606 cites·44 claims
- 0295US6954275B2Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithographyBOARDS OF REGENTS THE UNIVERSI·Filed 2001·Granted Oct 11, 2005·94 cites·49 claims
- 0393US6919152B2High resolution overlay alignment systems for imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 19, 2005·57 cites·28 claims
- 0489US10816482B2High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devicesUNIV TEXAS·Filed 2017·Granted Oct 27, 2020·6 cites·19 claims
- 0588US10336062B2Systems and methods for precision inkjet printingUNIV TEXAS·Filed 2017·Granted Jul 2, 2019·4 cites·26 claims
- 0656US2008095878A1Imprint Lithography Template Having a Feature Size Under 250 nmUNIV TEXAS·Filed 2007·Application pending·0 cites
- 0744US2004163563A1Imprint lithography template having a mold to compensate for material changes of an underlying liquidUNIV TEXAS·Filed 2004·Application pending·0 cites
- 0838US2002094496A1Method and system of automatic fluid dispensing for imprint lithography processesFiled 2002·Application pending·0 cites
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