Inventor · disambiguated record
Masasi Saito
Also filed as: SAITO MASASI
2 granted patents·196 citations·filing 1992–1994
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0190US5314541AReduced pressure processing system and reduced pressure processing methodTOKYO ELECTRON LTD·Filed 1992·Granted May 24, 1994·127 cites·9 claims
- 0281US5455082AReduced pressure processing system and reduced pressure processing methodTOKYO ELECTRON LTD·Filed 1994·Granted Oct 3, 1995·69 cites·8 claims
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