Inventor · disambiguated record
Mitsusuke Kyogoku
Also filed as: KYOGOKU MITSUSUKE
8 granted patents·333 citations·filing 1983–2000
90Inventor score
Top patents by PatentIndex Score
8 records- 0188US5658417AHF vapor selective etching method and apparatusNEC CORP·Filed 1995·Granted Aug 19, 1997·94 cites·2 claims
- 0285US4596934AElectron beam apparatus with improved specimen holderINT PRECISION INC·Filed 1983·Granted Jun 24, 1986·37 cites·7 claims
- 0381US5571330ALoad lock chamber for vertical type heat treatment apparatusASM JAPAN·Filed 1993·Granted Nov 5, 1996·81 cites·2 claims
- 0475US6024888AVapor selective etching method and apparatusNEC CORP·Filed 1996·Granted Feb 15, 2000·41 cites·17 claims
- 0572US6053686ADevice and method for load locking for semiconductor processingASM JAPAN·Filed 1999·Granted Apr 25, 2000·43 cites·14 claims
- 0667US6743329B1Sealing mechanism of multi-chamber load-locking deviceASM JAPAN·Filed 2000·Granted Jun 1, 2004·12 cites·5 claims
- 0750US5484483AThermal treatment apparatusASM JAPAN·Filed 1994·Granted Jan 16, 1996·22 cites·2 claims
- 0825US5509967AHeat treatment apparatusASM JAPAN·Filed 1993·Granted Apr 23, 1996·3 cites·2 claims
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