Inventor · disambiguated record

Stark Chen

Also filed as: CHEN STARK

1 granted patent·9 citations·filing 2002–2002

31Inventor score

Technology areasG05B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0151US6856847B2Method of identifying bottlenecks and improving throughput in wafer processing equipmentTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 15, 2005·9 cites·17 claims

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