Inventor · disambiguated record
Chivukula Subrahmanyam
Also filed as: SUBRAHMANYAM CHIVUKULA
7 granted patents·1 pending application·318 citations·filing 1997–2003
88Inventor score
Top patents by PatentIndex Score
8 records- 0192US6337262B1Self aligned T-top gate process integrationCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Jan 8, 2002·90 cites·5 claims
- 0285US6399448B1Method for forming dual gate oxideCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Jun 4, 2002·67 cites·12 claims
- 0384US6689653B1Method of preserving the top oxide of an ONO dielectric layer via use of a capping materialCHARTERED SEMICONDUCTOR MFG·Filed 2003·Granted Feb 10, 2004·43 cites·31 claims
- 0483US6248006B1CMP uniformityCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Jun 19, 2001·27 cites·7 claims
- 0581US6284613B1Method for forming a T-gate for better salicidationCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Sep 4, 2001·61 cites·10 claims
- 0664US5747369AFormation of a capacitor using a sacrificial etch stopCHARTERED SEMICONDUCTOR MFG·Filed 1997·Granted May 5, 1998·26 cites·30 claims
- 0747US6726545B2Linear polishing for improving substrate uniformityCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Apr 27, 2004·4 cites·25 claims
- 0830US2003090600A1Embedded light shield scheme for micro display backplane fabricationCHARTERED SEMICONDUCTORS MANUF·Filed 2001·Application pending·0 cites
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