Inventor · disambiguated record
Weilun Chao
Also filed as: CHAO WEILUN
2 granted patents·1 pending application·9 citations·filing 2006–2010
54Inventor score
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3 records- 0172US7931850B2Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2010·Granted Apr 26, 2011·2 cites·10 claims
- 0271US8546264B2Etching radical controlled gas chopped deep reactive ion etchingOLYNICK DEIRDRE·Filed 2006·Granted Oct 1, 2013·7 cites·20 claims
- 0354US2008093775A1Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2007·Application pending·0 cites
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