Inventor · disambiguated record

Claus Zahlten

Also filed as: ZAHLTEN CLAUS

1 granted patent·1 citations·filing 2011–2011

15Inventor score

Technology areasG02B

Files withMANN HANS-JUERGEN1

Top patents by PatentIndex Score

1 record

0160US9057964B2Imaging optics and projection exposure installation for microlithography with an imaging opticsMANN HANS-JUERGEN·Filed 2011·Granted Jun 16, 2015·1 cites·20 claims

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