Inventor · disambiguated record
Bernd Vollmer
Also filed as: VOLLMER BERND · VOLLMER BERND M · VOLLMER BERND MICHAEL
5 granted patents·2 pending applications·305 citations·filing 1992–2023
85Inventor score
Top patents by PatentIndex Score
7 records- 0191US5262354ARefractory metal capped low resistivity metal conductor lines and viasSIEMENS AG·Filed 1992·Granted Nov 16, 1993·187 cites·17 claims
- 0274US6300235B1Method of forming multi-level coplanar metal/insulator films using dual damascene with sacrificial flowable oxideSIEMENS AG·Filed 1997·Granted Oct 9, 2001·48 cites·23 claims
- 0367US5529670AMethod of depositing conductors in high aspect ratio apertures under high temperature conditionsIBM·Filed 1993·Granted Jun 25, 1996·37 cites·10 claims
- 0460US5798301AMethod of manufacturing metal interconnect structure for an integrated circuit with improved electromigration reliabilitySIEMENS AG·Filed 1997·Granted Aug 25, 1998·18 cites·9 claims
- 0556US5641992AMetal interconnect structure for an integrated circuit with improved electromigration reliabilitySIEMENS COMP INC·Filed 1995·Granted Jun 24, 1997·15 cites·3 claims
- 0650US2025316444A1Radiation tolerant detector architecture for charged particle detectionASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0746US2024242930A1Manipulation of carrier transport behavior in detectorASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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