Inventor · disambiguated record

Zhenkang Max Liang

Also filed as: LIANG ZHENKANG MAX

1 granted patent·2 citations·filing 2021–2021

19Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0185US11501976B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 15, 2022·2 cites·17 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →