Inventor · disambiguated record
Pieter-Jan Van Zwol
Also filed as: VAN ZWOL PIETER-JAN
30 granted patents·3 pending applications·67 citations·filing 2015–2024
95Inventor score
Files withASML NETHERLANDS BV33
Top patents by PatentIndex Score
33 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0296US10983431B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·5 cites·20 claims
- 0396US10698312B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2019·Granted Jun 30, 2020·8 cites·23 claims
- 0493US11971654B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2023·Granted Apr 30, 2024·1 cites·20 claims
- 0593US10466585B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·4 cites·20 claims
- 0692US11287737B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·5 cites·20 claims
- 0792US10359710B2Radiation system and optical deviceASML NETHERLANDS BV·Filed 2016·Granted Jul 23, 2019·5 cites·21 claims
- 0890US11686997B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2022·Granted Jun 27, 2023·1 cites·20 claims
- 0989US11467486B2Graphene pellicle lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·4 cites·21 claims
- 1088US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 1187US11320731B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2016·Granted May 3, 2022·3 cites·22 claims
- 1284US11092902B2Method and apparatus for detecting substrate surface variationsASML NETHERLANDS BV·Filed 2018·Granted Aug 17, 2021·2 cites·14 claims
- 1382US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 1482US10712656B2Method for manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2016·Granted Jul 14, 2020·4 cites·21 claims
- 1581US2024302734A1Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1680US12066758B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 1779US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 1879US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1978US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 2076US11947256B2Simultaneous double-side coating of multilayer graphene pellicle by local thermal processingASML NETHERLANDS BV·Filed 2018·Granted Apr 2, 2024·1 cites·22 claims
- 2176US11347142B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·0 cites·20 claims
- 2275US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 2375US2024302736A1Pellicle for euv lithographyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 2474US11314163B2Pellicle frame and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Apr 26, 2022·1 cites·20 claims
- 2571US12298663B2Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicleASML NETHERLANDS BV·Filed 2016·Granted May 13, 2025·1 cites·20 claims
- 2671US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 2767US10401723B2Patterning deviceASML NETHERLANDS BV·Filed 2017·Granted Sep 3, 2019·1 cites·13 claims
- 2861US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 2961US10732498B2Patterning deviceASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·0 cites·20 claims
- 3059US12271008B2Transmissive diffusorASML NETHERLANDS BV·Filed 2019·Granted Apr 8, 2025·0 cites·29 claims
- 3159US11977326B2Pellicle for EUV lithographyASML NETHERLANDS BV·Filed 2019·Granted May 7, 2024·0 cites·20 claims
- 3255US12436454B2Pellicle membraneASML NETHERLANDS BV·Filed 2020·Granted Oct 7, 2025·0 cites·20 claims
- 3350US11036128B2Membrane assemblyASML NETHERLANDS BV·Filed 2016·Granted Jun 15, 2021·0 cites·20 claims
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