Inventor · disambiguated record
Erik Achilles Abegg
Also filed as: ABEGG ERIK ACHILLES
8 granted patents·13 citations·filing 2016–2023
81Inventor score
Files withASML NETHERLANDS BV8
Top patents by PatentIndex Score
8 records- 0196US10983431B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·5 cites·20 claims
- 0293US10466585B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·4 cites·20 claims
- 0388US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 0480US12066758B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 0578US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 0676US11347142B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·0 cites·20 claims
- 0771US12298663B2Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicleASML NETHERLANDS BV·Filed 2016·Granted May 13, 2025·1 cites·20 claims
- 0871US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
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