Inventor
YANG DANIEL M Y
TW4 patents
Patents
4 patentsUS11756840B2Sep 12, 2023
Reflectance measurement system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11664260B2May 30, 2023
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10978331B2Apr 13, 2021
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12444657B2Oct 14, 2025
Wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49