Inventor · disambiguated record

Dai Junyan

Also filed as: JUNYAN DAI

1 granted patent·6 citations·filing 2001–2001

28Inventor score

Technology areasG03F

Files withIBM1

Top patents by PatentIndex Score

1 record

0160US6586156B2Etch improved resist systems containing acrylate (or methacrylate) silane monomersIBM·Filed 2001·Granted Jul 1, 2003·6 cites·23 claims

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