Inventor · disambiguated record
William M. Holber
Also filed as: HOLBER WILLIAM · HOLBER WILLIAM M · HOLBER WILLIAM MARTIN
42 granted patents·12 pending applications·2,688 citations·filing 1979–2024
99Inventor score
Top patents by PatentIndex Score
54 records- 0198US8309943B2Laser-driven light sourceSMITH DONALD K·Filed 2011·Granted Nov 13, 2012·42 cites·21 claims
- 0298US7764140B2Radio frequency power delivery systemMKS INSTR INC·Filed 2006·Granted Jul 27, 2010·139 cites·28 claims
- 0398US6559408B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted May 6, 2003·104 cites·15 claims
- 0498US6150628AToroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Nov 21, 2000·458 cites·44 claims
- 0597US6887339B1RF power supply with integrated matching networkAPPLIED SCIENCE & TECH INC·Filed 2001·Granted May 3, 2005·223 cites·21 claims
- 0697US6815633B1Inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Nov 9, 2004·207 cites·64 claims
- 0797US6388226B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted May 14, 2002·117 cites·36 claims
- 0896US8633782B2Radio frequency power delivery systemNAGARKATTI SIDDHARTH P·Filed 2010·Granted Jan 21, 2014·64 cites·17 claims
- 0996US6924455B1Integrated plasma chamber and inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Aug 2, 2005·82 cites·51 claims
- 1096US6486431B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted Nov 26, 2002·56 cites·51 claims
- 1196US5505816AEtching of silicon dioxide selectively to silicon nitride and polysiliconIBM·Filed 1993·Granted Apr 9, 1996·328 cites·15 claims
- 1295US7161112B2Toroidal low-field reactive gas sourceMKS INSTR INC·Filed 2003·Granted Jan 9, 2007·45 cites·11 claims
- 1395US6872909B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Mar 29, 2005·55 cites·10 claims
- 1495US6552296B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Apr 22, 2003·62 cites·20 claims
- 1594US9909215B2Method of CVD plasma processing with a toroidal plasma processing apparatusPLASMABILITY LLC·Filed 2017·Granted Mar 6, 2018·10 cites·28 claims
- 1694US8003935B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·41 cites·21 claims
- 1793US8704171B2Chemical ionization reaction or proton transfer reaction mass spectrometryMKS INSTR INC·Filed 2012·Granted Apr 22, 2014·13 cites·11 claims
- 1893US8334505B2Chemical ionization reaction or proton transfer reaction mass spectrometryROBINSON TIMOTHY ROGER·Filed 2008·Granted Dec 18, 2012·44 cites·6 claims
- 1993US7569790B2Method and apparatus for processing metal bearing gasesMKS INSTR INC·Filed 2005·Granted Aug 4, 2009·19 cites·6 claims
- 2093US7501600B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2005·Granted Mar 10, 2009·17 cites·25 claims
- 2192US8779322B2Method and apparatus for processing metal bearing gasesHOLBER WILLIAM M·Filed 2011·Granted Jul 15, 2014·19 cites·10 claims
- 2291US6664497B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted Dec 16, 2003·26 cites·49 claims
- 2390US7659489B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2007·Granted Feb 9, 2010·13 cites·34 claims
- 2490US7541558B2Inductively-coupled toroidal plasma sourceMKS INSTR INC·Filed 2006·Granted Jun 2, 2009·34 cites·26 claims
- 2589US5688382AMicrowave plasma deposition source and method of filling high aspect-ratio features on a substrateAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Nov 18, 1997·68 cites·14 claims
- 2689US5302266AMethod and apparatus for filing high aspect patterns with metalIBM·Filed 1992·Granted Apr 12, 1994·119 cites·24 claims
- 2789US4272699AElectron impact ion source with field emission cathodeMAX PLANCK GESELLSCHAFT·Filed 1979·Granted Jun 9, 1981·61 cites·3 claims
- 2888US8124906B2Method and apparatus for processing metal bearing gasesHOLBER WILLIAM M·Filed 2009·Granted Feb 28, 2012·30 cites·19 claims
- 2988US7166816B1Inductively-coupled torodial plasma sourceMKS INSTR INC·Filed 2004·Granted Jan 23, 2007·56 cites·18 claims
- 3086US10443150B2Toroidal plasma processing apparatus with a shaped workpiece holderPLASMABILITY LLC·Filed 2016·Granted Oct 15, 2019·2 cites·54 claims
- 3185US8003936B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·9 cites·26 claims
- 3284US10522330B2In-situ plasma cleaning of process chamber componentsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 31, 2019·3 cites·8 claims
- 3379US5208512AScanned electron cyclotron resonance plasma sourceIBM·Filed 1992·Granted May 4, 1993·34 cites·15 claims
- 3476US5263776AMulti-wavelength optical thermometryIBM·Filed 1992·Granted Nov 23, 1993·40 cites·10 claims
- 3576US2025059677A1Method of Growing Single Crystal Diamond Assisted by Polycrystalline Diamond GrowthPLASMABILITY LLC·Filed 2024·Application pending·0 cites
- 3672US2023392283A1Method of Growing Single Crystal Diamond Assisted by Polycrystalline Diamond GrowthPLASMABILITY LLC·Filed 2023·Application pending·0 cites
- 3770US11495434B2In-situ plasma cleaning of process chamber componentsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Nov 8, 2022·0 cites·12 claims
- 3868US2018155839A1Method of CVD Plasma Processing with a Toroidal Plasma Processing ApparatusPLASMABILITY LLC·Filed 2018·Application pending·0 cites
- 3968US2014272108A1Toroidal Plasma Processing ApparatusHOLBER WILLIAM·Filed 2014·Application pending·0 cites
- 4065US11037758B2In-situ plasma cleaning of process chamber componentsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Jun 15, 2021·0 cites·16 claims
- 4165US2023392255A1Multiple Chamber System for Plasma Chemical Vapor Deposition of Diamond and Related MaterialsPLASMABILITY LLC·Filed 2023·Application pending·0 cites
- 4264US2024240354A1Method of Growing Personalized Single Crystal DiamondPLASMABILITY LLC·Filed 2024·Application pending·0 cites
- 4362US12173427B2Method of growing single crystal diamond assisted by polycrystalline diamond growthPLASMABILITY LLC·Filed 2020·Granted Dec 24, 2024·0 cites·56 claims
- 4462US10704161B2Toroidal plasma processing apparatus with a shaped workpiece holderPLASMABILITY LLC·Filed 2019·Granted Jul 7, 2020·0 cites·25 claims
- 4561US8173986B2Laser-heated infrared sourceHOLBER WILLIAM M·Filed 2010·Granted May 8, 2012·1 cites·31 claims
- 4653US2006137612A1Methods and apparatus for downstream dissociation of gasesMKS INSTR INC·Filed 2005·Application pending·0 cites
- 4752US5625259AMicrowave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tubeAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Apr 29, 1997·25 cites·23 claims
- 4851US7238266B2Method and apparatus for fluorine generation and recirculationMKS INSTR INC·Filed 2002·Granted Jul 3, 2007·4 cites·24 claims
- 4951US2008083609A1Oxygen conditioning of plasma vesselsMKS INSTR INC·Filed 2007·Application pending·0 cites
- 5048US2008083701A1Oxygen conditioning of plasma vesselsMKS INSTR INC·Filed 2006·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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