Inventor · disambiguated record
Terry Sheng
Also filed as: SHENG TERRY · SHENG TERRY T · SHENG TERRY TIENYU
4 granted patents·1 pending application·309 citations·filing 1993–2009
81Inventor score
Top patents by PatentIndex Score
5 records- 0194US5354381APlasma immersion ion implantation (PI3) apparatusVARIAN ASSOCIATES·Filed 1993·Granted Oct 11, 1994·201 cites·11 claims
- 0288US5572038ACharge monitor for high potential pulse current dose measurement apparatus and methodVARIAN ASSOCIATES·Filed 1993·Granted Nov 5, 1996·76 cites·11 claims
- 0376US6632482B1Plasma immersion ion implantation processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1996·Granted Oct 14, 2003·29 cites·21 claims
- 0462US8164879B2Step down dechuckingSHENG TERRY·Filed 2009·Granted Apr 24, 2012·3 cites·18 claims
- 0544US2011018423A1Indirect heated cathode of ion implanterSHENG TERRY·Filed 2009·Application pending·0 cites
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