Inventor · disambiguated record
Sang Sim
Also filed as: SIM SANG T · SIM SANG TAE
2 granted patents·2 pending applications·168 citations·filing 2003–2006
70Inventor score
Top patents by PatentIndex Score
4 records- 0196US7077904B2Method for atomic layer deposition (ALD) of silicon oxide filmSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jul 18, 2006·129 cites·23 claims
- 0293US7435445B2Method for manufacturing semiconductor deviceMOOHAN CO LTD·Filed 2006·Granted Oct 14, 2008·39 cites·7 claims
- 0351US2006090694A1Method for atomic layer deposition (ALD) of silicon oxide filmSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 0439US2004082171A1ALD apparatus and ALD method for manufacturing semiconductor deviceFiled 2003·Application pending·0 cites
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