Inventor · disambiguated record

Tohru Isogami

Also filed as: ISOGAMI TOHRU

1 granted patent·0 citations·filing 2006–2006

3Inventor score

Technology areasG03F

Files withNIKON CORP1

Top patents by PatentIndex Score

1 record

0139US8018577B2Illumination-sensor calibration methods, and exposure methods and apparatus and device-manufacturing methods including same, and reflective masks used in sameNIKON CORP·Filed 2006·Granted Sep 13, 2011·0 cites·36 claims

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