Inventor · disambiguated record
Miwa Igarashi
Also filed as: IGARASHI MIWA
22 granted patents·3 pending applications·738 citations·filing 1996–2021
96Inventor score
Top patents by PatentIndex Score
25 records- 0196US6329125B2Chemically amplified resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 2000·Granted Dec 11, 2001·154 cites·1 claims
- 0296US6013416AChemically amplified resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 1996·Granted Jan 11, 2000·164 cites·15 claims
- 0396US5968713AChemically amplified resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 1997·Granted Oct 19, 1999·165 cites·20 claims
- 0492US6200725B1Chemically amplified resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 1997·Granted Mar 13, 2001·105 cites·8 claims
- 0581US8669542B2Extreme ultraviolet light source apparatusWATANABE YUKIO·Filed 2010·Granted Mar 11, 2014·5 cites·7 claims
- 0675US10916910B2Line narrowing moduleGIGAPHOTON INC·Filed 2019·Granted Feb 9, 2021·1 cites·19 claims
- 0774US5910392AResist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor deviceFUJITSU LTD·Filed 1997·Granted Jun 8, 1999·46 cites·17 claims
- 0873US6052261AMethod for manufacturing magnetoresistance headFUJITSU LTD·Filed 1996·Granted Apr 18, 2000·23 cites·28 claims
- 0971US9301379B2Extreme ultraviolet light generation apparatusWATANABE YUKIO·Filed 2012·Granted Mar 29, 2016·3 cites·23 claims
- 1068US9198273B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 24, 2015·3 cites·16 claims
- 1163US11411364B2Line narrowing module, gas laser apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Aug 9, 2022·0 cites·17 claims
- 1261US9179534B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 3, 2015·1 cites·5 claims
- 1359US11978997B2Laser apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 7, 2024·0 cites·4 claims
- 1458US6200724B1Chemical amplification resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 1996·Granted Mar 13, 2001·16 cites·16 claims
- 1556US2021367390A1Gas laser apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Application pending·0 cites
- 1654US6582878B2Chemical amplification resist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 2001·Granted Jun 24, 2003·3 cites·3 claims
- 1753US5906912AProcesses for forming resist pattern and for producing semiconductor deviceFUJITSU LTD·Filed 1997·Granted May 25, 1999·20 cites·33 claims
- 1851US9894743B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2015·Granted Feb 13, 2018·0 cites·22 claims
- 1948US9882334B2Mirror deviceGIGAPHOTON INC·Filed 2016·Granted Jan 30, 2018·0 cites·9 claims
- 2047US5962191AResist compositions for forming resist patternsFUJITSU LTD·Filed 1998·Granted Oct 5, 1999·11 cites·7 claims
- 2141US5804354AComposition for forming conductivity imparting agent and pattern forming methodFUJITSU LTD·Filed 1997·Granted Sep 8, 1998·8 cites·3 claims
- 2241US2013037693A1Optical system and extreme ultraviolet (euv) light generation system including the optical systemGIGAPHOTON INC·Filed 2011·Application pending·0 cites
- 2340US5824452AResist compositions and process for the formation of resist patternsFUJITSU LTD·Filed 1996·Granted Oct 20, 1998·7 cites·7 claims
- 2434US6605414B2Method for manufacturing magnetoresistance headFUJITSU LIMTIED·Filed 1999·Granted Aug 12, 2003·3 cites·20 claims
- 2531US2017205631A1Narrow band laser apparatus and method for positioning line narrow moduleGIGAPHOTON INC·Filed 2017·Application pending·0 cites
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