Inventor · disambiguated record
Paul Sunal
Also filed as: SUNAL PAUL
6 granted patents·20 citations·filing 2009–2019
77Inventor score
Top patents by PatentIndex Score
6 records- 0184US9053929B1Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress statesHUFF MICHAEL A·Filed 2011·Granted Jun 9, 2015·8 cites·34 claims
- 0280US10403463B2Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devicesCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2017·Granted Sep 3, 2019·2 cites·65 claims
- 0379US9852870B2Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devicesOZGUR MEHMET·Filed 2011·Granted Dec 26, 2017·5 cites·65 claims
- 0469US8852378B2Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devicesHUFF MICHAEL A·Filed 2009·Granted Oct 7, 2014·5 cites·34 claims
- 0564US10910185B2Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devicesCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2019·Granted Feb 2, 2021·0 cites·50 claims
- 0654US12297529B1Method and system for controlling the state of stress in deposited thin filmsCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2019·Granted May 13, 2025·0 cites·73 claims
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