Inventor · disambiguated record

Namyeol Yang

Also filed as: YANG NAMYEOL

1 granted patent·1 citations·filing 2011–2011

16Inventor score

Technology areasG03F

Files withSHIN YOUNGHOON1

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1 record

0154US9116436B2Maskless exposure apparatus including spatial filter having phase shifter pattern and exposure methodSHIN YOUNGHOON·Filed 2011·Granted Aug 25, 2015·1 cites·18 claims

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