Inventor · disambiguated record
Akiyoshi Tsuda
Also filed as: TSUDA AKIYOSHI
8 granted patents·79 citations·filing 1997–2013
84Inventor score
Top patents by PatentIndex Score
8 records- 0187US7894203B2Multilayer printed wiring boardIBIDEN CO LTD·Filed 2004·Granted Feb 22, 2011·53 cites·11 claims
- 0263US8356404B2Method of producing multilayer printed wiring board and photosensitive dry film used thereforIBIDEN CO LTD·Filed 2006·Granted Jan 22, 2013·2 cites·8 claims
- 0356US5981118AMethod for charged particle beam exposure with fixed barycenter through balancing stage scanFUJITSU LTD·Filed 1998·Granted Nov 9, 1999·10 cites·4 claims
- 0450US8779378B2Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detectorADVANTEST CORP·Filed 2013·Granted Jul 15, 2014·0 cites·13 claims
- 0549US6046459AMethod and system for charged particle beam exposureFUJITSU LTD·Filed 1999·Granted Apr 4, 2000·7 cites·17 claims
- 0645US8859993B2Sample holder of electron beam exposure apparatus and electron beam exposure method using the sameADVANTEST CORP·Filed 2013·Granted Oct 14, 2014·0 cites·11 claims
- 0744US8420300B2Method of producing multilayer printed wiring board and photosensitive dry film used thereforTSUDA AKIYOSHI·Filed 2010·Granted Apr 16, 2013·0 cites·7 claims
- 0837US5966200ACharged particle beam exposure apparatusFUJITSU LTD·Filed 1997·Granted Oct 12, 1999·7 cites·4 claims
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