Inventor · disambiguated record
Ilwoong Koo
Also filed as: KOO ILWOONG
2 granted patents·0 citations·filing 2013–2014
22Inventor score
Top patents by PatentIndex Score
2 records- 0143US9783884B2Method for implementing low dose implant in a plasma systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 10, 2017·0 cites·16 claims
- 0233US9142438B2Techniques for clamping and declamping a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Sep 22, 2015·0 cites·7 claims
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