Inventor · disambiguated record
Michael Andrew Chieda
Also filed as: CHIEDA MICHAEL ANDREW
4 granted patents·1 pending application·10 citations·filing 2013–2019
67Inventor score
Files withASML HOLDING NV5
Top patents by PatentIndex Score
5 records- 0190US10324383B2Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted Jun 18, 2019·5 cites·24 claims
- 0286US11500298B2Reticle sub-field thermal controlASML HOLDING NV·Filed 2019·Granted Nov 15, 2022·4 cites·20 claims
- 0372US11048175B2Apparatus for and method cleaning a support inside a lithography apparatusASML HOLDING NV·Filed 2018·Granted Jun 29, 2021·1 cites·22 claims
- 0450USRE49066EChucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted May 10, 2022·0 cites·50 claims
- 0537US2015212425A1Quantitative Reticle Distortion Measurement SystemASML HOLDING NV·Filed 2013·Application pending·0 cites
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