Inventor · disambiguated record
Richard F. Reichelderfer
Also filed as: REICHELDERFER RICHARD · REICHELDERFER RICHARD F
6 granted patents·848 citations·filing 1977–1990
89Inventor score
Top patents by PatentIndex Score
6 records- 0196US4313783AComputer controlled system for processing semiconductor wafersBRANSON INT PLASMA·Filed 1980·Granted Feb 2, 1982·221 cites·26 claims
- 0294US4148705AGas plasma reactor and processDIONEX CORP·Filed 1977·Granted Apr 10, 1979·58 cites·16 claims
- 0393US4324611AProcess and gas mixture for etching silicon dioxide and silicon nitrideBRANSON INT PLASMA·Filed 1980·Granted Apr 13, 1982·410 cites·13 claims
- 0480US5016332APlasma reactor and process with wafer temperature controlBRANSON INT PLASMA·Filed 1990·Granted May 21, 1991·98 cites·12 claims
- 0572US4127437AProcess for etching SiO2 utilizing HF vapor and an organic catalystDIONEX CORP·Filed 1977·Granted Nov 28, 1978·29 cites·18 claims
- 0666US4380488AProcess and gas mixture for etching aluminumBRANSON INT PLASMA·Filed 1981·Granted Apr 19, 1983·32 cites·11 claims
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