Inventor · disambiguated record
Michael C. Matter
Also filed as: MATTER MICHAEL C
2 granted patents·1 pending application·169 citations·filing 1985–2003
70Inventor score
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3 records- 0196US6617587B2Electron optics for multi-beam electron beam lithography toolMULTIBEAM SYSTEMS INC·Filed 2002·Granted Sep 9, 2003·104 cites·6 claims
- 0283US4751446ALookup table initializationAPOLLO COMPUTER·Filed 1985·Granted Jun 14, 1988·65 cites·19 claims
- 0341US2004119021A1Electron optics for multi-beam electron beam lithography toolION DIAGNOSTICS·Filed 2003·Application pending·0 cites
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