Inventor · disambiguated record

Shozou Maeda

Also filed as: MAEDA SHOZOU

2 granted patents·2 citations·filing 2014–2017

37Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0167US10727042B2Liquid processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jul 28, 2020·1 cites·9 claims
0254US9348340B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 24, 2016·1 cites·4 claims

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Shozou Maeda — Patent Inventor | PatentIndex