Inventor · disambiguated record
Satoshi Yonekura
Also filed as: YONEKURA SATOSHI
3 granted patents·1 pending application·4 citations·filing 2013–2023
55Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0167US9831067B2Film-forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Nov 28, 2017·2 cites·13 claims
- 0266US10513777B2Film formation deviceTOKYO ELECTRON LTD·Filed 2013·Granted Dec 24, 2019·2 cites·7 claims
- 0354US11281116B2Substrate stage and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 22, 2022·0 cites·6 claims
- 0454US2024052950A1Automatic pressure control device, film forming apparatus and pressure control methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →