Inventor · disambiguated record

Tsai-Sheng Giau

Also filed as: GIAU TSAI-SHENG

1 granted patent·19 citations·filing 2002–2002

40Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0174US6774044B2Reducing photoresist shrinkage via plasma treatmentTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 10, 2004·19 cites·7 claims

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