Inventor · disambiguated record

Tsutomu Amakawa

Also filed as: AMAKAWA TSUTOMU

1 granted patent·17 citations·filing 1999–1999

39Inventor score

Technology areasH10P

Files withNHK SPRING CO LTD1

Top patents by PatentIndex Score

1 record

0149US6204486B1Heater unit for semiconductor processingNHK SPRING CO LTD·Filed 1999·Granted Mar 20, 2001·17 cites·16 claims

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