Inventor · disambiguated record
Yang-Hung Chang
Also filed as: CHANG YANG-HUNG
11 granted patents·28 citations·filing 2013–2020
87Inventor score
Top patents by PatentIndex Score
11 records- 0193US10281827B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 7, 2019·5 cites·20 claims
- 0290US9053284B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 9, 2015·8 cites·20 claims
- 0389US10031426B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 24, 2018·5 cites·20 claims
- 0483US10514612B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·2 cites·20 claims
- 0579US10866524B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·1 cites·20 claims
- 0679US10684556B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 16, 2020·1 cites·20 claims
- 0777US10031997B1Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 24, 2018·2 cites·20 claims
- 0876US9070622B2Systems and methods for similarity-based semiconductor process controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 30, 2015·4 cites·20 claims
- 0971US11513444B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 1064US10867116B2Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 1164US10521548B2Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
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