Inventor · disambiguated record

Shigeo Uoya

Also filed as: UOYA SHIGEO

1 granted patent·50 citations·filing 1989–1989

48Inventor score

Technology areasH10W

Files withMITSUBISHI ELECTRIC CORP1

Top patents by PatentIndex Score

1 record

0173US5001084AMethod for applying a treatment liquid on a semiconductor waferMITSUBISHI ELECTRIC CORP·Filed 1989·Granted Mar 19, 1991·50 cites·4 claims

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