Inventor · disambiguated record
Andersen Chang
Also filed as: CHANG ANDERSEN
1 granted patent·2 pending applications·25 citations·filing 2001–2001
42Inventor score
Files withUNITED MICROELECTRONICS CORP2
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3 records- 0177US6680252B2Method for planarizing barc layer in dual damascene processUNITED MICROELECTRONICS CORP·Filed 2001·Granted Jan 20, 2004·25 cites·19 claims
- 0230US2002110765A1Photolithography process for producing gates and conductive linesUNITED MICROELECTRONICS CORP·Filed 2001·Application pending·0 cites
- 0329US2002106588A1Photolithography process for forming an openingFiled 2001·Application pending·0 cites
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