Inventor · disambiguated record
Gerrit Maarten Bonnema
Also filed as: BONNEMA GERRIT M · BONNEMA GERRIT MAARTEN
4 granted patents·2,348 citations·filing 1997–1999
85Inventor score
Top patents by PatentIndex Score
4 records- 0198US6262796B1Positioning device having two object holdersASM LITHOGRAPHY BV·Filed 1998·Granted Jul 17, 2001·634 cites·11 claims
- 0296US5969441ATwo-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning deviceASM LITHOGRAPHY BV·Filed 1997·Granted Oct 19, 1999·1.6k cites·14 claims
- 0389USRE40043EPositioning device having two object holdersASML NETHERLANDS BV·Filed 1998·Granted Feb 5, 2008·96 cites·15 claims
- 0440US6348303B1Lithographic projection apparatusASM LITHOGRAPHY BV·Filed 1999·Granted Feb 19, 2002·9 cites·15 claims
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