Inventor · disambiguated record

Kazuki Tobikawa

Also filed as: TOBIKAWA KAZUKI

1 granted patent·1 citations·filing 2014–2014

15Inventor score

Technology areasH10P

Files withNISSIN ION EQUIPMENT CO LTD1

Top patents by PatentIndex Score

1 record

0152US9601359B2Substrate holding device, semiconductor fabrication device, and substrate clamping ascertainment methodNISSIN ION EQUIPMENT CO LTD·Filed 2014·Granted Mar 21, 2017·1 cites·7 claims

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