Inventor · disambiguated record

Alex Veytser

Also filed as: VEYTSER ALEX

1 granted patent·41 citations·filing 2001–2001

47Inventor score

Technology areasH10P

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1 record

0185US6795292B2Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamberFiled 2001·Granted Sep 21, 2004·41 cites·26 claims

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Alex Veytser — Patent Inventor | PatentIndex