Inventor · disambiguated record
Yoshihito Ookawa
Also filed as: OOKAWA YOSHIHITO
2 granted patents·53 citations·filing 2000–2001
64Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0187US6758941B1Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unitTOKYO ELECTRON LTD·Filed 2000·Granted Jul 6, 2004·38 cites·8 claims
- 0269US6448094B2Method of detecting etching depthTOKYO ELECTRON LTD·Filed 2001·Granted Sep 10, 2002·15 cites·13 claims
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