Inventor · disambiguated record
Klaus Mehlkopp
Also filed as: MEHLKOPP KLAUS
3 granted patents·90 citations·filing 1996–2002
75Inventor score
Top patents by PatentIndex Score
3 records- 0184US6864988B2Optical system with isolated measuring structureZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Mar 8, 2005·24 cites·23 claims
- 0279US6523443B1Process for manufacturing optical surfaces and shaping machine for carrying out this processZEISS STIFTUNG·Filed 1996·Granted Feb 25, 2003·47 cites·18 claims
- 0375US6750949B2Lithographic apparatus and device manufacturing methodAMSL NETHERLANDS BV·Filed 2002·Granted Jun 15, 2004·19 cites·28 claims
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